Wafer holding body

ABSTRACT

A wafer holding unit includes a disk-shaped ceramic substrate having a wafer mounting surface on an upper surface of the substrate, an RF electrode, for example, embedded within the substrate, a metal terminal inserted from a lower surface of the substrate, and a connecting terminal which electrically connects the RF electrode and the metal terminal with each other. The connecting terminal is constituted by a ceramic member and a metal layer. The ceramic member is made of the same material as the substrate and preferably has a truncated conical shape. The metal layer covers a surface of the ceramic member. An upper end of the metal layer is connected to the RF electrode, while a lower end of the metal layer is connected to the metal terminal with a metal member interposed therebetween.

CROSS-REFERENCE TO RELATED APPLICATIONS

The present application is a continuation of U.S. application Ser. No.15/739,061, filed De. 21, 2017, which is based on PCT filingPCT/JP2016/069570, filed Jul. 1, 2016, and claims priority to JP2015-139738, filed Jul. 13, 2015, the entire contents of each areincorporated herein by reference.

TECHNICAL FIELD

The present invention relates to a wafer holding unit.

BACKGROUND ART

PTL 1 discloses a susceptor including a ceramic member having anembedded conductive member therein corresponding to a heater electrode,for example.

PTL 2 discloses the following ceramic susceptor. Screw holes are formedin portions on the lower surface of a disk-shaped ceramic substrateincluding electric circuits therein so as to expose the electriccircuits. Metal terminals (anchor members) are screwed into these screwholes, so that one end of each of the metal terminals can be connectedto the corresponding electric circuit and the other ends of the metalterminals can be connected to power-supply conductive members.

PTL 3 discloses a technology for connecting a metal terminal insertedfrom the lower surface of a ceramic wafer holding unit to an electrodeembedded within the ceramic wafer holding unit via a connectingterminal.

CITATION LIST Patent Literature

PTL 1: Japanese Unexamined Patent Application Publication No. 10-273371

PTL 2: Japanese Unexamined Patent Application Publication No.2003-086663

PTL 3: Japanese Unexamined Patent Application Publication No.2008-305968

SUMMARY OF INVENTION

A wafer holding unit provided by the present disclosure includes adisk-shaped ceramic substrate having a wafer mounting surface on anupper surface of the substrate, an electrode embedded within thesubstrate, a metal terminal inserted from a lower surface of thesubstrate, and a connecting terminal which electrically connects theelectrode and the metal terminal with each other. The connectingterminal is constituted by a ceramic member and a metal layer. Theceramic member is made of the same material as the substrate. The metallayer covers a surface of the ceramic member. An upper end of the metallayer is connected to the electrode, while a lower end of the metallayer is connected to the metal terminal with a metal member interposedtherebetween.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is a longitudinal sectional view partially and schematicallyillustrating a first specific example of a wafer holding unit accordingto the present invention.

FIG. 2 is a longitudinal sectional view partially and schematicallyillustrating a second specific example of a wafer holding unit accordingto the present invention.

FIG. 3A is a longitudinal sectional view partially and schematicallyillustrating a third specific example of a wafer holding unit accordingto the present invention.

FIG. 3B is a longitudinal sectional view partially and schematicallyillustrating another third specific example of a wafer holding unitaccording to the present invention.

FIG. 3C is a longitudinal sectional view partially and schematicallyillustrating another third specific example of a wafer holding unitaccording to the present invention.

FIG. 3D is a longitudinal sectional view partially and schematicallyillustrating another third specific example of a wafer holding unitaccording to the present invention.

FIG. 4A is a longitudinal sectional view partially and schematicallyillustrating a fourth specific example of a wafer holding unit accordingto the present invention.

FIG. 4B is a longitudinal sectional view partially and schematicallyillustrating another fourth specific example of a wafer holding unitaccording to the present invention.

FIG. 4C is a longitudinal sectional view partially and schematicallyillustrating another fourth specific example of a wafer holding unitaccording to the present invention.

FIG. 4D is a longitudinal sectional view partially and schematicallyillustrating another fourth specific example of a wafer holding unitaccording to the present invention.

DESCRIPTION OF EMBODIMENTS Technical Problem

In accordance with increased performance of recent electronic devices,in a semiconductor device manufacturing process, it is desirable toperform film deposition under higher temperatures and high-efficiencyfilm deposition by using plasma with the application of increasedvoltages to an RF electrode. To satisfy such a demand, a wafer holdingunit, such as those described above, desirably has a structure in whichmore reliable power supply to an embedded heater electrode or anembedded RF electrode than in the related art is achieved without anyfailures, such as breakage caused by a difference in the thermalexpansion.

The present invention has been made in view of this background. It is anobject of the present invention to provide a high-reliability ceramicwafer holding unit including a heater circuit and an RF electrodetherein, in which power is reliably supplied to the heater circuit andthe RF electrode from the outside, and also, breakage, which would becaused by a difference in the thermal expansion, is less likely to occurin the heater circuit and the RF electrode.

Advantageous Effects of the Disclosure

According to the present invention, it is possible to reliably supplypower to electrodes embedded in a ceramic substrate without anybreakage, which would be caused by a difference in the thermalexpansion.

Description of Embodiments of the Invention of this Application

Embodiments of the present invention will first be described below. Awafer holding unit according to an embodiment of the present inventionincludes a disk-shaped ceramic substrate having a wafer mounting surfaceon an upper surface of the substrate, an electrode embedded within thesubstrate, a metal terminal inserted from a lower surface of thesubstrate, and a connecting terminal which electrically connects theelectrode and the metal terminal with each other. The connectingterminal is constituted by a ceramic member and a metal layer. Theceramic member is made of the same material as the substrate. The metallayer covers a surface of the ceramic member. An upper end of the metallayer is connected to the electrode, while a lower end of the metallayer is connected to the metal terminal with a metal member interposedtherebetween. This configuration makes is possible to reliably supplypower to the electrode embedded in the ceramic substrate without anybreakage, which would be caused by a difference in the thermalexpansion. It is preferable that the surface of the ceramic member beentirely covered by the metal layer in terms of reducing the electricalresistance. The above-described disk shape is not limited to a precisetrue circle, and includes an elliptical shape, which is represented bythe major axis and the minor axis, and a substantially elliptical shape.

In the wafer holding unit according to an embodiment of the presentinvention, the metal terminal may be screwed with the substrate.Alternatively, the metal terminal may be screwed with the metal member.If the metal terminal is screwed with the substrate, it can firmly befixed with a simple structure. If the metal terminal is screwed with themetal member, the area of contact between the metal terminal and themetal member is increased, thereby further decreasing the resistance.

In the wafer holding unit according to an embodiment of the presentinvention, the ceramic member of the connecting terminal may preferablyhave a truncated conical shape. With this configuration, whenfabricating the wafer holding unit, the connecting terminal can easilybe brought into close contact with the substrate without any gaptherebetween. Additionally, the connecting terminal can be preventedfrom being displaced toward the wafer mounting surface. This can preventthe connecting terminal from pressing the portion of the ceramicsubstrate positioned above the electrode, which receives power via theconnecting terminal, thereby eliminating the occurrence of defects, suchas warpage or cracks, in this portion of the ceramic substrate.

In the wafer holding unit according to an embodiment of the presentinvention, the electrode may be an RF plasma-forming electrode, a heaterelectrode, or an electrostatic chuck electrode. In any of theseelectrodes, the above-described various advantages can be obtained.

A wafer holding unit 10 according to a first specific example of thepresent invention will be described below with reference to FIG. 1. Thewafer holding unit 10 according to the first specific example of thepresent invention includes a disk-shaped substrate 11, an Electrode 12,a metal terminal 13, and a connecting terminal 14. The substrate 11 hasa wafer mounting surface 11 a on the upper surface of the substrate 11.On the wafer mounting surface 11 a, a semiconductor wafer (not shown),which is a subject to be processed, is mounted. The Electrode 12 isembedded within the substrate 11. The metal terminal 13 is inserted inthe substrate 11 from the lower surface thereof. The connecting terminal14 electrically connects the Electrode 12 and the metal terminal 13 witheach other.

The individual elements will be specifically described below. Thesubstrate 11 is typically a member horizontally supported by a tubularsupport member from downward. As the material for the substrate 11,ceramics having high stiffness and high thermal conductivity, such asaluminum nitride, silicon nitride, silicon carbide, or aluminum oxide,is preferably used, and aluminum nitride is more preferably used.

The Electrode 12, which is used for creating an atmosphere of plasmaabove the wafer mounting surface 11 a during film deposition, isembedded within the substrate 11 on a level parallel with the wafermounting surface 11 a. In order to ground the Electrode 12 or supplypower thereto, the metal terminal 13 is inserted in the substrate 11such that the lower end of the metal terminal 13 protrudes from thelower surface of the substrate 11. The external surface of at least theupper end of the metal terminal 13 is threaded, and is engaged with ascrew hole of the substrate 11 into which the metal terminal 13 isscrewed. Conductive wires, which are not shown, are connected to theprotruding lower end of the metal terminal 13. A heater electrode 15,which is used for heating a semiconductor wafer mounted on the wafermounting surface 11 a, is also embedded within the substrate 11 suchthat it is separated from the Electrode 12 and is placed fartherdownward than the Electrode 12. The structure in which power is suppliedto the heater electrode 15 may be similar to that for the Electrode 12,or a typical terminal structure may be used for the heater electrode 15.Either of the structures may be used, and an explanation thereof will beomitted.

The connecting terminal 14 constituted by a ceramic member 14 a and ametal layer 14 b is also embedded within the substrate 11. The ceramicmember 14 a has a truncated conical shape and is made of the samematerial as the substrate 11. The metal layer 14 b covers the entiretyof the lateral surface of the ceramic member 14 a. The connectingterminal 14 is embedded within the substrate 11 in the state in whichthe central axis of the connecting terminal 14 is parallel with thethickness direction of the substrate 11. The tapered leading end surfaceof the connecting terminal 14 abuts against the lower side of theElectrode 12, while the tapered back end surface of the connectingterminal 14 abuts against the upper end surface of the metal terminal 13with a disk-shaped metal member 16 interposed therebetween.

As described above, the ceramic member 14 a is made of the same materialas the substrate 11. Because of this configuration, the difference inthe thermal expansion becomes almost zero in a wide range oftemperatures. A thermal stress is thus less likely to be producedbetween the connecting terminal 14 and the area around thereof. As aresult, breakage, such as cracks, is less likely to occur in a waferholding unit including a thin substrate 11. The ceramic member 14 a maybe formed in another shape, such as a cylinder, a prism, a column havingan enlarged or reduced intermediate portion, or a truncated pyramid.However, the above-described truncated conical shape is most preferablebecause a higher-reliability connecting terminal structure can easily beformed with this shape.

The material for the above-described metal layer 14 b and metal member16 and the material for the above-described Electrode 12 and heaterelectrode 15 are preferably tungsten (W), molybdenum (Mo), or an alloythereof, apart from incidental impurities. The reason for this is thatthe difference in the coefficient of thermal expansion between any ofthese metals and ceramics forming the substrate 11 is relatively small,thereby making it possible to reduce the occurrence of defects, such aswarpage or cracks in the wafer holding unit. The material for the metalterminal 13 is preferably at least one metal or at least one alloyselected from the group consisting of tungsten, molybdenum, an alloythereof, nickel, Kovar, a copper-tungsten alloy, a copper-molybdenumalloy, and a copper-nickel-iron-tungsten alloy, apart from incidentalimpurities.

As the above-described disk-shaped metal member 16 abutting against theback end surface of the connecting terminal 14, a metal member having anouter diameter greater than that of the back end surface of theconnecting terminal 14 is used. With this configuration, while theloop-like upper end of the metal layer 14 b entirely abuts against theElectrode 12, the loop-like lower end of the metal layer 14 b of theconnecting terminal 14 can entirely abut against the metal member 16.Thus, more reliable electrical connection between the upper end of themetal terminal 13 and the Electrode 12 is achieved than in a known powersupply terminal. Failures, such as local generation of Joule heating,will less likely to occur during power supply. The metal member 16 isnot restricted to a disk shape. The metal member 16 may alternatively bea member having another shape, such as a polygonal planar member orloop-like member, if the loop-like lower end of the metal layer 14 b canentirely abut against the metal member 16.

The above-described wafer holding unit can be fabricated by thefollowing method. First, three ceramic substrates made of the samematerial and having the same outer diameter are prepared. A through-holeis formed in one of these substrates at a position at which theabove-described connecting terminal 14 will be embedded. Thisthrough-hole is formed in a tapered structure in which the innerdiameter gradually becomes smaller toward the wafer mounting surface 11a. Then, a ceramic member made of the same material as theabove-described ceramic substrate is prepared. This ceramic member has atruncated conical shape having a tapered structure so that it can fitinto the through-hole. The lateral surface of the ceramic member iscoated with a metal layer having substantially the same thickness alongthe entire circumference.

The lateral surface of the ceramic member may be coated with a metallayer in the following manner. Metallizing may be performed for applyinga tungsten paste to the lateral surface of the ceramic member and firingthe tungsten paste, so that a tungsten layer having a thickness of about10 to 50 μm may coat the lateral surface of the ceramic member.Alternatively, a tungsten-made sleeve member having a thickness of about50 to 2 mm may be separately formed and then be attached to the lateralsurface of the ceramic member. The ceramic member coated with the metallayer in this manner is inserted into the through-hole of the substrateand is brought into closer contact with the substrate. As a result,almost no gap is formed around the ceramic member coated with the metallayer, thereby preventing the entry of plasma into the wafer holdingunit.

The upper and lower ends of the metal layer are exposed in a loop-likeshape on the front and back surfaces of the ceramic substrate. In orderto form an RF electrode on the front surface and a heater electrode onthe back surface of the ceramic substrate, patterning layers of atungsten paste, for example, are applied to the front and back surfacesof the ceramic substrate by screen printing. After the application of atungsten paste, the patterning layers are dried and are then dewaxedunder an atmosphere of nitrogen at a temperature of about 800° C. Theremaining two substrates are overlaid on the front and back surfaces ofthe ceramic substrate, and then, the three substrates are hot-pressedunder an atmosphere of nitrogen at a temperature of about 1800° C. As aresult, an integrated disk-shaped body including integrated threeceramic substrates is obtained.

Then, a counterbore having an inner diameter that can accommodate ametal terminal is formed from the lower surface of this integrateddisk-shaped body toward the ceramic member, so that the lower end of theceramic member is exposed together with the metal layer coating thelateral surface of the ceramic member. Then, a metal member is bonded tothe lower end of the exposed metal layer and ceramic member by brazing,and more preferably, by metallizing using tungsten. Further, a metalterminal having a threaded leading end is screwed into the counterbore.While screwing the metal terminal, this threaded leading end is causedto abut against the lower surface of the metal member. As a result, awafer holding unit is fabricated.

A wafer holding unit according to a second specific example of thepresent invention will now be described below. As shown in FIG. 2, in awafer holding unit 20 according to the second specific example of thepresent invention, a metal terminal 23 and a substrate 21 are notscrewed with each other, and instead, the metal terminal 23 and a metalmember 26 are screwed with each other. Except for this characteristic,the structure of the wafer holding unit 20 is basically similar to thatof the wafer holding unit 10 according to the first specific example ofthe present invention.

More specifically, the wafer holding unit 20 includes a disk-shapedsubstrate 21, an Electrode 22, a metal terminal 23, a connectingterminal 24, and a heater electrode 25. The substrate 21 is made ofaluminum nitride, for example, and has a wafer mounting surface 21 a onthe upper surface thereof. The Electrode 22 is embedded within thesubstrate 21. The metal terminal 23 is inserted in the substrate 21 fromthe lower surface thereof. The connecting terminal 24 electricallyconnects the Electrode 22 and the metal terminal 23 with each other. Theheater electrode 25 is embedded within the substrate 21 such that it isseparated from the Electrode 22 and is placed farther downward than theElectrode 22. The connecting terminal 24 is constituted by a ceramicmember 24 a and a metal layer 24 b. The ceramic member 24 a has atruncated conical shape and is made of the same material as thesubstrate 21. The metal layer 24 b covers the entirety of the lateralsurface of the ceramic member 24 a. The tapered leading end surface ofthe connecting terminal 24 abuts against the lower side of the Electrode22, while the tapered back end surface of the connecting terminal 24 iselectrically connected to the upper end surface of the metal terminal 23with a disk-shaped metal member 26 interposed therebetween.

The metal terminal 23 and the metal member 26 may be screwed with eachother in the following manner. As shown in FIG. 2, a male threadprotruding downward may be provided on the lower surface of the metalmember 26, while a female thread which is screwed with the male threadmay be provided on the forward end of the metal member 26. Conversely, amale thread protruding upward may be provided on the forward end of themetal member, while a female thread which is screwed with the malethread may be provided on the lower surface of the metal member. Inwhichever case, the area of contact between the metal terminal and themetal member is increased, thereby further decreasing the resistance.

A wafer holding unit according to a third specific example of thepresent invention will now be described below. As shown in FIG. 3A, in awafer holding unit 30 according to the third specific example of thepresent invention, by providing a step portion in a screw hole of asubstrate 31 into which a metal terminal 33 is inserted, the innerdiameter of the screw hole is partially enlarged at the opening side ofthe substrate 31. A tubular sealing member 37 is fit into this enlargedportion such that it surrounds the metal terminal 33. Then, glass 38seals the area between the loop-like forward end of the sealing member37 and the step portion of the screw hole. This configuration canprotect from adverse influences, such as corrosion, caused by the entryof air and atmospheric gases into the area where the metal terminal 33and the substrate 31 are screwed with each other.

The structure of the wafer holding unit according to the third specificexample of the present invention is basically similar to that of thewafer holding unit 10 according to the first specific example of thepresent invention, except for the above-described tubular sealing member37 and glass 38. More specifically, the wafer holding unit 30 includes adisk-shaped substrate 31, an Electrode 32, a metal terminal 33, aconnecting terminal 34, and a heater electrode 35. The substrate 31 ismade of aluminum nitride, for example, and has a wafer mounting surface31 a on the upper surface thereof. The Electrode 32 is embedded withinthe substrate 31. The metal terminal 33 is inserted in the substrate 31from the lower surface thereof. The connecting terminal 34 electricallyconnects the Electrode 32 and the metal terminal 33 with each other. Theheater electrode 35 is embedded within the substrate 31 such that it isseparated from the Electrode 32 and is placed farther downward than theElectrode 32. The connecting terminal 34 is constituted by a ceramicmember 34 a and a metal layer 34 b. The ceramic member 34 a has atruncated conical shape and is made of the same material as thesubstrate 31. The metal layer 34 b covers the entirety of the lateralsurface of the ceramic member 34 a. The tapered leading end surface ofthe connecting terminal 34 abuts against the lower side of the Electrode32, while the tapered back end surface of the connecting terminal 34 iselectrically connected to the upper end surface of the metal terminal 33with a disk-shaped metal member 36 interposed therebetween.

The sealing structure using the tubular sealing member and glass may beapplied to the power supply terminal structure in a wafer holding unit130 shown in FIG. 3B, such as that of the second specific example. As ina wafer holding unit 230 shown in FIG. 3C, a flange 233 a may be formedin a metal terminal 233 at a position of a step portion of the screwhole of a substrate 231. Then, the forward end surface of the tubularsealing member 37 is positioned such that it opposes the lower surfaceof the flange 233 a and the surface of the step portion of the screwhole, and glass 38 is charged into the area where the tubular sealingmember 37 opposes the flange 233 a and the step portion. In this case,the sealing surface made by the glass 38 becomes perpendicular to thedirection in which the tubular sealing member 37 presses, therebyachieving more reliable sealing.

If a wafer holding unit is configured such that a flange is formed in ametal terminal to seal as described above, the power supply terminalstructure according to the second specific example is preferablyemployed. The reason for this is as follows. It is seen that, uponcomparing the above-described wafer holding unit 230 shown in FIG. 3Cwith a wafer holding unit 330 shown in FIG. 3D using the second specificexample, the distance L2 between the forward end of a metal terminal 333fixed to a substrate and a flange 333 a in the wafer holding unit 330can be made shorter than the distance L1 between the metal terminal 233and the flange 233 a in the wafer holding unit 230. With theconfiguration of the wafer holding unit 330, the influence of thedifference in the thermal expansion between the substrate and the metalterminal made of different materials can be reduced to be smaller.

A wafer holding unit according to a fourth specific example of thepresent invention will now be described below. As shown in FIG. 4A, in awafer holding unit 40 according to the fourth specific example of thepresent invention, a loop-like member 49 having substantially the samediameter of a tubular sealing member 47 which is fit around a metalterminal 43 is provided on the upper portion of the tubular sealingmember 47. Instead of charging glass into the area between the loop-likemember 49 and a step portion of a screw hole, glass 48 is charged intothe area between the sealing member 47 and the loop-like member 49.

The structure of the wafer holding unit according to the fourth specificexample of the present invention is basically similar to that of thewafer holding unit 10 according to the first specific example of thepresent invention, except for the above-described tubular sealing member47, loop-like member 49, and glass 48. More specifically, the waferholding unit 40 includes a disk-shaped substrate 41, an Electrode 42, ametal terminal 43, a connecting terminal 44, and a heater electrode 45.The substrate 41 is made of aluminum nitride, for example, and has awafer mounting surface 41 a on the upper surface thereof. The Electrode42 is embedded within the substrate 41. The metal terminal 43 isinserted in the substrate 41 from the lower surface thereof. Theconnecting terminal 44 electrically connects the Electrode 42 and themetal terminal 43 with each other. The heater electrode 45 is embeddedwithin the substrate 41 such that it is separated from the Electrode 42and is placed farther downward than the Electrode 42. The connectingterminal 44 is constituted by a ceramic member 44 a and a metal layer 44b. The ceramic member 44 a has a truncated conical shape and is made ofthe same material as the substrate 41. The metal layer 44 b covers theentirety of the lateral surface of the ceramic member 44 a. The taperedleading end surface of the connecting terminal 44 abuts against thelower side of the Electrode 42, while the tapered back end surface ofthe connecting terminal 44 is electrically connected to the upper endsurface of the metal terminal 43 with a disk-shaped metal member 46interposed therebetween.

If glass is charged into corners A of a certain portion, such as a stepportion of a screw hole of a ceramic substrate, stress may beconcentrated on the glass at the corners A, which may crack the glass.However, by charging glass into the area between the sealing member andthe loop-like member as described above, the need to charge glass intothe corners A is eliminated, thereby achieving more reliable sealing. Inthis case, it is more preferable that the corners A of the step portionof the screw hole be formed by a gentle curve. Wafer holding units 140,240, and 340 shown in FIGS. 4B through 4D respectively correspond to thewafer holding units 130, 230, and 330 of the third specific exampleshown in FIGS. 3B through 3D. In the wafer holding units 40, 140, 240,and 340, in addition to the advantages of the third specific example,the advantage achieved by this two-piece sealing member is obtained.

The wafer holding units of the present invention have been describedthrough illustration of plural specific examples. However, the presentinvention is not restricted to these specific examples, and may becarried out in various modes without departing from the spirit and thescope of the present invention. For example, in the wafer holding unitsof the above-described specific examples, electrodes embedded within asubstrate (embedded electrodes) are an RF electrode for forming plasmaand a heater electrode. Instead of one of these electrodes or inaddition to at least one of these electrodes, an electrostatic chuckelectrode may be embedded, and the above-described power supply terminalstructure may be applied to at least one of these electrodes.

EXAMPLES

To check the advantages of the present invention, a wafer holding unitaccording to the first specific example of the present invention, suchas that shown in FIG. 1, was fabricated and operated. More specifically,three disk-shaped substrates made of aluminum nitride (AlN) and havingan outer diameter of 330 mm and individually having a thickness of 9 mm,5 mm, and 9 mm were prepared. Among these three disk-shaped substrates,a tapered through-hole having an average inner diameter of 4 mm wasprovided in one ceramic substrate having a thickness of 9 mm, and atruncated conical member made of aluminum nitride and having the sametaper angle as that of this through-hole was prepared. A tungsten pastewas applied to the lateral surface of this truncated conical member andwas then fired, thereby forming a metal layer having a thickness of 0.03mm.

The truncated conical member having the metallized lateral surface wasinserted into the through-hole of the ceramic substrate and was fixedtherein. Patterning layers of a tungsten paste for forming an RFelectrode and a heater electrode were applied to the front and backsurfaces of the ceramic substrate by screen printing and were thenfired, thereby forming electrodes. Then, the above-described ceramicsubstrate having a thickness of 5 mm was overlaid on one of the frontand back surfaces of the ceramic substrate on which the RF electrode wasformed, while another ceramic substrate having a thickness of 9 mm wasoverlaid on the other one of the front and back surfaces of the ceramicsubstrate on which the heater electrode was formed. In this state, thethree ceramic substrates were hot-pressed so as to be integrated intoone ceramic substrate.

Then, a counterbore was formed by machining from the lower surface ofthis integrated substrate toward the truncated conical member, so thatthe lower end of the truncated conical member was exposed together withthe metal layer coating the lateral surface of the truncated conicalmember. Then, a tungsten paste was applied to the lower end of theexposed metal layer and truncated conical member, so that atungsten-made disk member having an outer diameter of 5.0 mm and athickness of 1 mm was bonded to the exposed metal layer and truncatedconical member. Then, while screwing a tungsten-made metal terminalhaving a threaded leading end into this counterbore, this threadedleading end was caused to abut against the lower surface of thetungsten-made disk member. The heater electrode was exposed by theformation of a screw hole from the lower surface of the substrate, andwas then connected to the tungsten-made metal terminal by screwing thetungsten-made metal terminal into the screw hole.

A tubular support member was attached to the lower surface of the waferholding unit fabricated as described above, and the wafer holding unitwith the tubular support member was placed within a vacuum chamber of asemiconductor manufacturing device. Conductive wires were caused to passthrough this tubular support member and were connected to the metalterminal protruding from the lower surface of the wafer holding unit.Then, by supplying power to the conductive wire for the heater electrodeunder a vacuum atmosphere, the temperature of the wafer holding unit wasraised to 550° C., and then, while maintaining the temperature at 550°C., an alternating current voltage of 1600 W and 13.56 MHz was appliedfrom the conductive wire for the RF electrode and was repeatedly turnedON (60 seconds) and OFF (30 seconds) ten thousand times. As a result ofthis, it was found that the wafer holding unit was operated under goodconditions without any failures, such as overheating and cracks.

REFERENCE SIGNS LIST

10, 20, 30, 40 wafer holding unit

11, 21, 31, 41 substrate

11 a, 21 a, 31 a, 41 a wafer mounting surface

12, 22, 32, 42 electrode

13, 23, 33, 43 metal terminal

14, 24, 34, 44 connecting terminal

14 a, 24 a, 34 a, 44 a ceramic member

14 b, 24 b, 34 b, 44 b metal layer

15, 25, 35, 45 heater electrode

16, 26, 36, 46 metal member

37, 47 sealing member

38, 48 glass

49 loop-like member

130, 230, 330 wafer holding unit

140, 240, 340 wafer holding unit

233, 333 metal terminal

233 a, 333 a flange

A corner

1. A wafer holding unit comprising: a substantially disk-shaped ceramicsubstrate having a wafer mounting surface on an upper surface of thesubstrate; an electrode embedded within the substrate; a connectingterminal embedded to have an end surface on one side being in contactwith the electrode; a hole that opens at a lower surface of thesubstrate to have a bottom surface that is an end surface of theconnecting terminal on another side; and a metal terminal disposedwithin the hole, wherein the hole includes a first inner diameterportion that is positioned on a side of the connecting terminal and asecond inner diameter portion that has an inner diameter larger than aninner diameter of the first inner diameter portion, the second innerdiameter portion opening at the lower surface, wherein, at the secondinner diameter portion, a tubular sealing member is disposed, thesealing member surrounding the metal terminal, and wherein the waferholding unit includes a filler in a space formed by a step portion and aforward end of the sealing member, the step portion being positionedbetween the first inner diameter portion and the second inner diameterportion.
 2. The wafer holding unit according to claim 1, wherein themetal terminal includes a flange, and wherein the sealing member isdisposed in contact with the flange.
 3. The wafer holding unit accordingto claim 1, wherein the hole includes a third inner diameter portionbetween the first inner diameter portion and the second inner diameterportion, the third inner diameter portion having an intermediate innerdiameter between the inner diameter of the first inner diameter portionand the inner diameter of the second inner diameter portion.
 4. Thewafer holding unit according to claim 1, comprising: a metal memberwithin the hole, wherein the metal member is disposed between theconnecting terminal and the metal terminal to be in contact with boththe connecting terminal and the metal terminal, the metal member beingnot in contact with the filler.
 5. The wafer holding unit according toclaim 4, wherein the metal member has a disk-shaped surface on the oneside, the surface on the one side having an outer diameter larger thanan outer diameter of an end surface of the connecting terminal on a sideof a lower end of the connecting terminal.
 6. The wafer holding unitaccording to claim 4, wherein the connecting terminal is constituted bya ceramic member and a metal layer, the ceramic member being made of thesame material as the substrate, the metal layer covering a side surfaceof the ceramic member, and wherein, at an upper end of the connectingterminal, the metal layer is in contact with the electrode, wherein, atthe lower end of the connecting terminal, the metal layer is in contactwith the metal member, and, on a side opposite to a side where the metallayer is in contact with the metal member, the metal member is incontact with the metal terminal.
 7. The wafer holding unit according toclaim 1, wherein the metal terminal is screwed with the substrate or themetal member.
 8. The wafer holding unit according to claim 1, whereinthe connecting terminal has a truncated conical shape.
 9. The waferholding unit according to claim 1, wherein the filler is glass.
 10. Thewafer holding unit according to claim 1, wherein the electrode is an RFplasma-forming electrode, a heater electrode, or an electrostatic chuckelectrode.
 11. A wafer holding unit comprising: a substantiallydisk-shaped ceramic substrate having a wafer mounting surface on anupper surface of the substrate; an electrode embedded within thesubstrate; a connecting terminal embedded to have an end surface on oneside being in contact with the electrode; a hole that opens at a lowersurface of the substrate to have a bottom surface that is an end surfaceof the connecting terminal on another side; and a metal terminaldisposed within the hole, wherein the hole includes a first innerdiameter portion that is positioned on a side of the connecting terminaland a second inner diameter portion that has an inner diameter largerthan an inner diameter of the first inner diameter portion, the secondinner diameter portion opening at the lower surface, wherein, at thesecond inner diameter portion, a tubular sealing member and a tubularloop-like member are disposed, the tubular sealing member surroundingthe metal terminal, the tubular loop-like member surrounding the metalterminal, wherein the loop-like member is positioned on a side of thefirst inner diameter portion from the sealing member, and wherein thewafer holding unit includes a filler between the sealing member and theloop-like member, the filler sealing a gap between the second innerdiameter portion and the metal terminal.
 12. The wafer holding unitaccording to claim 11, wherein the metal terminal includes a flange, andwherein the loop-like member is disposed in contact with the flange. 13.The wafer holding unit according to claim 11, wherein the hole includesa third inner diameter portion between the first inner diameter portionand the second inner diameter portion, the third inner diameter portionhaving an intermediate inner diameter between the inner diameter of thefirst inner diameter portion and the inner diameter of the second innerdiameter portion.
 14. The wafer holding unit according to claim 11,comprising: a metal member within the hole, wherein the metal member isdisposed between the connecting terminal and the metal terminal to be incontact with both the connecting terminal and the metal terminal, themetal member being not in contact with the filler.
 15. The wafer holdingunit according to claim 14, wherein the metal member has a disk-shapedsurface on the one side, the surface on the one side having an outerdiameter larger than an outer diameter of an end surface of theconnecting terminal on a side of a lower end of the connecting terminal.16. The wafer holding unit according to claim 14, wherein the connectingterminal is constituted by a ceramic member and a metal layer, theceramic member being made of the same material as the substrate, themetal layer covering a side surface of the ceramic member, and wherein,at an upper end of the connecting terminal, the metal layer is incontact with the electrode, wherein, at the lower end of the connectingterminal, the metal layer is in contact with the metal member, and, on aside opposite to a side where the metal layer is in contact with themetal member, the metal member is in contact with the metal terminal.17. The wafer holding unit according to claim 11, wherein the metalterminal is screwed with the substrate or the metal member.
 18. Thewafer holding unit according to claim 11, wherein the connectingterminal has a truncated conical shape.
 19. The wafer holding unitaccording to claim 11, wherein the filler is glass.
 20. The waferholding unit according to claim 11, wherein the electrode is an RFplasma-forming electrode, a heater electrode, or an electrostatic chuckelectrode.